← All chemicals

CAS 10294-34-5

Boron trichloride

Boron trichloride (BCl3) is a colorless, fuming, highly corrosive gas used in semiconductor manufacturing and chemical synthesis. It reacts violently with moisture to form hydrochloric acid, which can burn eyes, skin, and lungs [1][2].

Where It Comes From

Made and used in industry for plasma etching/doping in electronics, as a reagent/catalyst, and in metal refining; releases can occur from leaks, transfers, or transport incidents [1][3].

How You Are Exposed

Mainly by breathing contaminated workplace air; the public may be exposed during accidental releases near facilities or transport routes [2][3].

Why It Matters

Irritates and corrodes the respiratory tract, skin, and eyes; high exposures can cause severe breathing trouble and delayed lung injury (pulmonary edema). It forms corrosive hydrochloric acid on contact with moisture [1][2][3].

Who Is at Risk

Semiconductor and chemical workers, metal refiners, lab staff, and emergency responders; people close to industrial sites during a release [1][3].

How to Lower Your Exposure

At work, use closed systems, local exhaust, gas monitoring, and proper PPE; follow spill/leak plans. During a release, move away or shelter indoors with windows/vents closed and follow local guidance; do not use water on spills [1][2][3].

References

  1. [1]WHO/IPCS International Chemical Safety Card (ICSC 1342): Boron trichloride. https://www.inchem.org/documents/icsc/icsc/eics1342.htm
  2. [2]CDC/NIOSH Pocket Guide to Chemical Hazards: Boron trichloride. https://www.cdc.gov/niosh/npg/npgd0066.html
  3. [3]U.S. EPA Acute Exposure Guideline Levels (AEGLs): Boron trichloride. https://www.epa.gov/aegl/boron-trichloride-aegl-program-results

Track your exposure to Boron trichloride

Pollution Profile maps your lifetime exposure history to EPA-tracked chemicals.

Get early access

We use cookies and analytics to understand how people use Pollution Profile and improve the experience. We never sell your data. Learn more.